HITACHI S-4500 掃描電子顯微鏡

HITACHI S-4500 TYPE II COLD FIELD EMISSION SEM SYSTEM consisting of:

Performance:

- Secondary electron image resolution: 1.5 nm at 15 kVA

- Magnification: 20x – 500KX

- Objective aperture: 4 position externally selectable

- Stigmator: Octopole electromagnetic

- Scanning Coil: 2-stage electromagnetic

Electron Optics:

- Electron Gun: Cold field emission source

- Lens Type: Electromagnetic

- Objective Aperture: 4 position externally selectable

Sample Chamber:

- Size: Type II

- Airlock: Pre-pumped, max sample size: 150mm diameter

- Stage Motion: 5-axis manual; X/Y: 100mm/50 mm, Z: 3-33 mm, T: -5 Deg - +60 Deg., R: 360 Deg continuous

- Deben Stage Controller Option Included for Motorized Stage Control (X, Y & Rotation)

Display System:

- Image Display: Dual 12” Monitors

- Scanning Mode: Normal, reduced area, line scan, photo scan, spot position, split screen

- Scanning Speed: TV, 0.3, 2, 9, 25, 35, 100, 160 320 s/frame

- Signal Processing: Real-time processing, auto-brightness and contrast control, dynamic stigmator, autofocus

- frame averaging, frame integration, contrast conversion

Vacuum System:

- Full automatic operation with pneumatic valve control

- Ultimate vacuum: 10 (-7) Pa in electron gun chamber, 10(-4) Pa in specimen chamber

- Seiko Seiki Turbo Pump and Controller

- Vacuum Pump

Option Included with this System:

- Chamber Scope

- Turbo Pump & Controller

- Deben Stage Controller